WASHINGTON — U.S. Commerce Secretary Howard Lutnick has expressed concerns to Dutch firm ASML that one of its extreme-ultraviolet (EUV) lithography machines, critical for making advanced semiconductors, may have been delivered to China.
ASML, Europe's most valuable company and the sole producer of these highly specialized machines, denies the allegation. The company said it knows the precise location of all 340 EUV machines it has manufactured, including 26 that have been decommissioned, and none are in China.
"ASML has never shipped an EUV machine to China, nor have we shipped to China any component, module or equipment specially designed to be used in an EUV machine," the company said. ASML also noted it has not received any evidence from U.S. officials to support Lutnick's claim despite repeated requests.
Since 2019, the United States has enforced restrictions blocking the export of ASML's EUV lithography machines to China. These machines produce the semiconductors that power advanced artificial intelligence systems.
The Dutch government is taking the American claim seriously but is also pushing back. Dutch Trade Minister Sjoerd Sjoerdsma visited Washington in late June, engaging with Secretary Lutnick, other U.S. officials, and members of Congress.
Sjoerdsma sought to assure American counterparts that the Dutch government strictly enforces its export controls, including those related to EUV technology. Speaking on July 2, Sjoerdsma declined to provide specific details of his conversations regarding Lutnick's claim.
The Dutch government is not currently investigating the American allegation, Sjoerdsma said. He added, "If there were things to be investigated or perhaps even to be prosecuted, then obviously we would do so."
Some individuals briefed on the matter describe Lutnick's allegation as unverified but not unfounded. Industry experts largely consider it highly unlikely that an entire ASML EUV machine could have been shipped to China.
However, some experts believe that related components may have found their way to China, possibly through ASML's suppliers or other third-party entities. The full scope of the U.S. concern remains undisclosed.
